This book constitutes the proceedings of the 16th International Workshop on Cryptographic Hardware and Embedded Systems, CHES 2014, held in Busan, South Korea, in September 2014. The 33 full papers included in this volume were carefully reviewed and selected from 127 submissions. They are organized in topical sections named: side-channel attacks; new attacks and constructions; countermeasures; algorithm specific SCA; ECC implementations; implementations; hardware implementations of symmetric cryptosystems; PUFs; and RNGs and SCA issues in hardware.