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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS / Edition 2
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Barnes and Noble
Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS / Edition 2
Current price: $169.00
Barnes and Noble
Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS / Edition 2
Current price: $169.00
Loading Inventory...
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Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.