This book provides an overview of the noteworthy developments in the field of micromachining, with a specific focus on microinjection systems used for biological micromanipulation. The author also explores the design, development, and fabrication of new mechanical designs for micromachines, with plenty of examples that elucidate their modeling and control. The design and fabrication of a piezoelectric microinjector, constant force microinjector, constant force microgripper, PDVF microforce sensor, and a piezoelectric microsyringe are presented as examples of new technology for microinjection systems. This book is appropriate for both researchers and advanced students in bioengineering.