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Barnes and Noble

Plasma Sources for Thin Film Deposition and Etching

Current price: $72.95
Plasma Sources for Thin Film Deposition and Etching
Plasma Sources for Thin Film Deposition and Etching

Barnes and Noble

Plasma Sources for Thin Film Deposition and Etching

Current price: $72.95
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This latest volume of the well-known
Physics of Thin Films
Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.

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