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Silicon Technologies: Ion Implantation and Thermal Treatment / Edition 1
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Barnes and Noble
Silicon Technologies: Ion Implantation and Thermal Treatment / Edition 1
Current price: $184.95
Barnes and Noble
Silicon Technologies: Ion Implantation and Thermal Treatment / Edition 1
Current price: $184.95
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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.